A Novel Dual Tor sion Actuator for Large Displacement and Low Dr iving Voltage
Date Issued
2001-07-31
Date
2001-07-31
Author(s)
Wu,Wing
Huang, Long-Sun
Chen, Bin-Ru
Chang, Peizen
DOI
892218E002064
Abstract
An innovative, dual torsion actuator for large displacement and low driving
voltage is presented. In the structural segment with a dual torsion design, the
magnetically twisted micro actuator in the up position demonstrates a higher levitation
compared to one torsion design. In addition, the actuator is electrostatically driven,
clamping continuously down with a lower voltage. Fabrication and characterization of
the micro actuator has been first demonstrated. The calculation of the twisted angle
with respect to external magnetic fields is also conducted in a good agreement with the
experiment. The present study of a large displacement of 570 mm and a low clamping
voltage of 13 volt has been simultaneously achieved.
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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