Diamond pad conditioners with oriented polycrystalline diamond cubes

Journal
Advanced Materials Research
Journal Volume
126-128
Pages
326-331
Date Issued
2010
Author(s)
Lin, T.-W.
Chen, Y.-T.
Liao, Y.-S.
Chen, J.-S.
Lin, C.-Y.
Sung, J.C.
DOI
URI
URL
Abstract
Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of fast pad cutting and efficient removal of glazed layer that is formed by polishing wafers with slurry on dressed pad.
SDGs

[SDGs]SDG11

Type
conference paper

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