A Heuristic Input Control Method for a Single-Product and High-Volume Wafer Fabrication to Minimize the Number of Photomask Changes
Resource
Journal of Manufacturing Systems,23(1),30-45.
Journal
Journal of Manufacturing Systems
Journal Volume
23
Journal Issue
1
Pages
30-45
Date Issued
2004
Date
2004
Author(s)
Chern, C.C.
Huang, K. L.
Type
journal article