Thermal conductivity of Si/SiGe superlatice film

Resource

Journal of Applied Physics,104,104301.

Journal

Journal of Applied Physics

Journal Issue

104

Pages

-

Date Issued

2008

Date

2008

Author(s)

Liu, Chun-Kai

Yu, Chih-Kuang

Chien, Heng-Chieh

Hsu, Chung-Yen

Dai, Ming-Ji

Luo, Guang-Li

URI

Type

journal article