Sensor layouts for a long-stroke nano-positioning stage

Journal

SICE Annual Conference

Pages

432-437

ISBN

9.78491E+12

Date Issued

2014

Author(s)

Chen Y.Y.

Wu R.C.

DOI

10.1109/SICE.2014.6935203

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84911868463&doi=10.1109%2fSICE.2014.6935203&partnerID=40&md5=29a6b8d160b1aebed250d52c5a3d19b2

https://scholars.lib.ntu.edu.tw/handle/123456789/412582

SDGs

[SDGs]SDG7

Publisher

Society of Instrument and Control Engineers (SICE)

Type

conference paper