Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating
Resource
Microelectronic Engineering,86(4),615-618.
Journal
Microelectronic Engineering
Pages
615-618
Date Issued
2009-04
Date
2009-04
Author(s)
Abstract
Roller embossing has attracted more attention in recent years due to its rapid and continuous process for mass production. The fabrication of roller is a challenge due to microstructures on the curved surface. This paper proposes a method of fabricating roller mold with microstructures on the surface using novel stepped rotating lithography and electroless nickel plating. The results prove that the microstructures can be successfully fabricated onto the metal roller using the proposed procedure. In this study, the roller with micro-grooves whose average height is 1.1 μm and widths are 23 and 45 μm have been successfully fabricated. © 2009 Elsevier B.V. All rights reserved.
Type
journal article