A tool portfolio planning methodology for semiconductor wafer fabs

Journal

1999 IEEE International Symposium on Semiconductor Manufacturing

Pages

11-14

Date Issued

1999

Author(s)

You, R.-C.

Weng, C.-R.

Chou, Y.-C.

Wu, H.H.

Lu, L.-C.

DOI

10.1109/ISSM.1999.808726

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467341

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033355827&doi=10.1109%2fISSM.1999.808726&partnerID=40&md5=7aa8c3b4c981f77397f225c01f1bb239

Type

conference paper