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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
MEMS with thin-film aerogel
Details
MEMS with thin-film aerogel
Journal
IEEE Micro Electro Mechanical Systems
Pages
122-125
Date Issued
2001
Author(s)
SHIH-KANG FAN
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-0035008291&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/293823
Type
conference paper