Molecular beam epitaxy, atomic layer deposition, and multiple functions connected via ultra-high vacuum
Journal
Journal of Crystal Growth
Journal Volume
512
Pages
223-229
Date Issued
2019
Author(s)
Lin, K.Y.
Wan, H.W.
Chen, K.H.M.
Fanchiang, Y.T.
Chen, W.S.
Lin, Y.H.
Cheng, Y.T.
Chen, C.C.
Lin, H.Y.
Young, L.B.
Cheng, C.P.
Pi, T.W.
Kwo, J.
Type
journal article