A comprehensive evaluation of accuracy and performance metrics for a laser on-the-fly processing control system
Journal
Precision Engineering
Journal Volume
93
Start Page
310
End Page
323
ISSN
0141-6359
Date Issued
2025-05
Author(s)
Ping-Jian Huang
Abstract
Laser On-the-Fly processing technology integrates a motion platform and a laser galvanometer scanning system to achieve high-speed and high-precision dynamic on-the-fly processing. In this study, a UV pulsed laser On-the-Fly processing system was developed, and laser processing monitoring technology was introduced to realize real-time optimization of processing parameters through a synchronous multi-axis motion control system. Experimental results demonstrate that the system maintains a circularity error within 1 μm and an average error within 0.1 μm during a 10 μm diameter circular scan. Furthermore, the system achieves scanning speeds exceeding 3000 mm/s while maintaining a pattern distortion ratio of less than 1 %. This system is suitable for both single-axis and dual-axis processing of large-area planar substrates and maintains a stable laser spot with a highly uniform distribution during scanning, thereby effectively improving processing efficiency. The results of this study can provide a potential solution for future microfabrication industries.
SDGs
Publisher
Elsevier BV
Type
journal article