Advanced metal-gate/high-κ CMOS with small EOT and better high field mobility
Journal
ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology
Date Issued
2012
Author(s)
CHIEH-HSIUNG KUAN
Chin, A.
Chen, W.B.
Chen, P.C.
Wu, Y.H.
Chi, C.C.
Lee, Y.J.
Chang-Liao, K.S.
CHIEH-HSIUNG KUAN
Type
conference paper