Long-range AFM imaging with modified cycloid trajectory

Atomic force microscope (AFM) is capable of constructing accurate 3-D surface profile at a nanometer resolution. This paper demonstrates the amplitude-detection mode atomic force microscopy (AM-AFM) with long-range of the modified cycloid trajectory. For this purpose, the proposed system contains three axis scanner including the hybrid xy-scanning subsystem and the z-measuring subsystem. Besides, the internal model principle-based neural network complementary sliding mode control (IMP-based NNCSMC) approach of designing controller is implemented for the xy-piezoelectric scanner to overcome some uncertainties, i.e. hysteresis and cross-coupling effect. On the other hand, the neural network complementary sliding mode control (NNCSMC) scheme is employed on controller design along the z-piezoelectric scanner to precisely trace the topography change based on amplitude feedback signals. Due to incorporating the piezoelectric leg-based long traveling range nano-positioning stage (LTRPS) in xy-plane, an accurate AFM imaging can be obtained with the modified cycloid trajectory for long-range scanning. ? 2019 IEEE.