High purity nano-crystalline carbon nitride films prepared at ambient temperature by ion beam sputtering

Journal

Surface and Coatings Technology

Journal Volume

115

Journal Issue

2-3

Pages

116-122

Date Issued

1999

Author(s)

Lu, T.R.

Kuo, C.T.

Yang, J.R.

Chen, L.C.

Chen, K.H.

DOI

10.1016/S0257-8972(99)00154-1

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491673

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032681744&doi=10.1016%2fS0257-8972%2899%2900154-1&partnerID=40&md5=88c18d457521eeeae99597ade196835d

Type

journal article