Development of TiO2 Nanowire Detectors Fabricated by Electron Beam Lithography Technology
Date Issued
2011
Date
2011
Author(s)
Chen, Chao-Hao
Abstract
While the development of detector for micro gas chromatography (μGC) has been extensively investigated, the fabricated nanowire sensing film with electron beam lithography technology is relatively unexplored. This thesis study is focusing on developing a highly sensitive nanowire detector. We combined e-beam lithography and TiO2 thin film deposition for nanowire fabrication, and designed engineered, well-aligned nanostructures for gas sensing film. The detector with TiO2 sensing film was proved to be sensitive to volatile organic compounds (VOC). We fabricated TiO2 detectors using both E-beam lithography and photolithography. In comparison with microwire detectors, nanowire detectors showed better performances at the same temperature and the same gas concentration. We further deposit the platinum on the TiO2 sensing film and added annealing in fabrication process to improve the yield. Great performances of these Pt-doped and annealed nanowire detectors were demonstrated through connecting to a commercial GC system.
Subjects
TiO2
nanowire
gas detector
E-beam lithography
micro gas chromatography
E-beam evaporation
Type
thesis
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