Nonlinear electromechanical behavior of an electrostatic microrelay
Journal
Transducers' 1997
Date Issued
1997
Author(s)
M.-A. Gr?tillat
Y.-J. Yang
E. S. Hung
V. Rabinovich
G. K. Ananthasuresh
N. F. de Rooij
S. D. Senturia
Description
Chicago
Type
conference paper