Iridium metal thin films and patterned IrO2 nanowires deposited using iridium(I) carbonyl precursors

Journal

Chemical Vapor Deposition

Journal Volume

12

Journal Issue

7

Pages

442-447

Date Issued

2006

Author(s)

Chen, Y.-L.

Hsu, C.-C.

Song, Y.-H.

Chi, Y.

Carty, A.J.

Lee, G.-H.

DOI

10.1002/cvde.200606491

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-33845562731&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/322667

Type

journal article