Ultrathin TiO2 amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously

Resource

Journal of Vacuum Science & Technology B 21 (6): 3062-3066

Journal

Journal of

Journal Volume

Vacuum

Journal Issue

6

Pages

3062-3066

Date Issued

2003

Date

2003

Author(s)

Lai, F. D.

Chang, C. M.

Wang, L. A.

Yih, T. S.

URI

http://ntur.lib.ntu.edu.tw//handle/246246/148205

Type

journal article

File(s)

Name

50.pdf

Size

119.14 KB

Format

Adobe PDF

Checksum

(MD5):18d38664ec472684448732aba86a0a55