Modeling gas damping and spring phenomena in MEMS with frequency dependent macro-models

Resource

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Journal

The 14th IEEE International Conference on Micro Electro Mechanical Systems

Pages

-

Date Issued

2001-01

Date

2001-01

Author(s)

Kamon, Mattan

Rabinovich, V.L.

Ghaddar, Chahid

Deshpande, Manish

Greiner, Ken

Gilbert, J.R.

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

00906554.pdf

Size

462.2 KB

Format

Adobe PDF

Checksum

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