Frequency Response of Micro-Cantilever Array in Different Media
Date Issued
2011
Date
2011
Author(s)
Lin, Chan-Hao
Abstract
The interaction of micro-cantilever array vibration in inviscid and viscous fluid was demonstrated in this report. Comparatively vibration between array and single beam is based on response frequency in different fluid.
First, two kind incompressible fluid theorem are introduced, which develop already. The inviscid theorem is solved by potential theorem which finds the hydrodynamic loading in circular section. Therefore, the viscous theorem is solved by Green’s function, also finds hydrodynamic loading but in zero thickness flat section. Hydrodynamic loadings in different fluid are coupled into structural by utilizing Euler beam vibration theory. Finally, the coupled frequency responses are acquired.
Second, follow the interest in theorem we discussed are matched by analytic simulation. The coupled nature frequencies in inviscid fluid are verified by FEM simulation, and change the geometry into flat cantilever beam array in accordance with we expect. To verify the viscous theorem, three theorems are exploited, single beam theorem, single approximate solution, and array theorem. There has an assumption that the cantilever array separate far enough will similar to a single beam.
Finally, the mainly physical parameter is gap ratio, which is found by consider the impact of change phase shift, amplitude ratio and gap ratio, that the flat beam array vibrate in viscous fluid. The influence of couple interaction has been detected that will reduce to 5%, the gap ratio must be above 0.41 in inviscid fluid and 0.59 in viscous fluid.
Subjects
inviscid
viscous
micro-cantilever array
vibration
Type
thesis
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