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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
On the Polishing Kinematics of CMP
Details
On the Polishing Kinematics of CMP
Journal
Proceeding of the 14th CSME Annual Conference, 現代工程技術
Pages
P.448-454
Date Issued
1997
Author(s)
Lee, Bor-Shin
DAR-ZEN CHEN
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/586250
Type
conference paper