奈米直寫儀之校準與系統整合
Date Issued
2004
Date
2004
Author(s)
林嘉龍
DOI
zh-TW
Abstract
The thesis work can find its foundation form the extraordinary optical transmission phenomena published in Journal Nature in 1998. The focus is to utilize the focusing and directional beaming phenomenon, which is strongly influenced by the subwavelength period structure, in an engineering system. In 2002, D. J. Lin, a master graduate of our team had completed his thesis on the qualitative analysis of directional beaming. In 2003, L. B. Yu, a Ph.D. of our group had proposed a new viewpoint on directional beaming.
With an attempt to capitalize on the above-mentioned research, our team has been trying to create a nanowriter machine. In this dissertation, works was done to analyze design parameter of optical head, to design the components needed, to program the GUI (graphical user interface) and to optimize the alignment method needed. We attempted to improve lithography technology by using the nanowriter system even though the underlying physical understanding related to directional beaming is still incomplete.
Finally, according to direct writing test results done by this newly developed machine, the nanowriter system was found to be stable and reliable. Nonetheless, line width and writing quality did not meet our original expectations. The profile of period structures and other design parameters were proposed to be the underlying mechanism for this less than perfect performance.
Subjects
系統整合
奈米結構
Nano-structure
System Integration
Type
thesis
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