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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Photo-enhanced wet oxidation and etching of GaN
Details
Photo-enhanced wet oxidation and etching of GaN
Journal
201st meeting of the Electrochemical Society
Date Issued
2002-05
Author(s)
LUNG-HAN PENG
H.-M. Wu
C.-C. Chuo
J.-I. Chyi
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/299281
Type
conference paper