Adaptive tilting angles for a dual-probe AFM system to increase image accuracy.

Journal

IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016, Banff, AB, Canada, July 12-15, 2016

Pages

1318-1223

Date Issued

2016

Author(s)

Lo, Yu-Ting

Wu, Jim-Wei

Liu, Wei-Chih

Liu, Da-Wei

Chang, Kuang-Yao

DOI

URI

URL

Type

conference paper