Voltage linearity improvement of HfO2-based metal-insulator- metal capacitors with H2 O prepulse treatment

Journal

Journal of the Electrochemical Society

Journal Volume

158

Journal Issue

2

Date Issued

2011

Author(s)

Lin, C.-M.

Chen, Y.-T.

Lee, C.-H.

Chang, H.-C.

Chang, W.-C.

Chang, H.-L.

DOI

10.1149/1.3517173

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-78650730754&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/365220

SDGs

[SDGs]SDG6

Type

journal article