Generating high DOF light by using tapered hollow tube in a lithography system

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

8249

Date Issued

2012

Author(s)

Chen, C.-Y.

Lee, Y.-H.

Chien, C.-J.

Yu, Y.-Y.

DOI

10.1117/12.906722

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486167

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84859597571&doi=10.1117%2f12.906722&partnerID=40&md5=3e22f544ce962677d32eed76a34e5237

Type

conference paper