The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Journal

Journal of Micromechanics and Microengineering

Journal Volume

18

Journal Issue

5

Start Page

055034

Date Issued

2008

Author(s)

Wang, Xuan-Yu

Lee, Chi-Yuan

Hu, Yuh-Chung

Lee, Chih-Cheng

Huang, Jung-Tang

DOI

URI

Description

Article number 055034

Type

journal article