Surface integrity of silicon wafers in ultra precision machining

Resource

International Journal of Advanced Manufacturing Technology 29 (3-4): 372-378

Journal

International Journal of Advanced Manufacturing Technology

Journal Issue

29

Pages

372-378

Date Issued

2004

Date

2004

Author(s)

Young, H.T.

Liao, H.T.

Huang, H.Y.

URI

Type

journal article

File(s)

Name

05.pdf

Size

743.49 KB

Format

Adobe PDF

Checksum

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