Force sensor fabrication by AgNWs film using 532?nm pulses laser
Journal
Applied Surface Science
Journal Volume
484
Pages
1019-1026
Date Issued
2019
Author(s)
Abstract
This current study investigated the effects of laser direct writing (LDW)on the capacitance force sensor of a poly(3,4-ethylenedioxythiophene):poly(styrene sulfonic acid)film mixer with silver nanowire thin films by using a 532-nm laser system. The technique was combined with various scanning speeds (i.e., 800, 1000, and 1200 mm s?1)to investigate the effectiveness of the force sensor. During interdigitated electrode fabrication, the laser fluence and laser pulse repetition frequency were fixed at 5.42 J/cm2 and 40 kHz, respectively. Nonloading force and various loading force states were used to test the function of the electrode under different LDW conditions. A best correlation coefficient of approximately 0.88 confirmed a linear functional dependence between the square of the pattern width and capacitance under the micromachining speed of 1000 mm s?1. Moreover, in the nonloading force state, the capacitance value increased with the increase in the electrode pattern width under a micromachining speed of 800 mm s?1. Regarding the loading force status, the capacitance increased when the loading force increased from 18 to 90 g. When the interdigitated pattern line width was 500 μm and electrode micromachining speed was 800 mm s?1, the maximum capacitance value was 71.5 pF under a loading force of 90 g. ? 2019 Elsevier B.V.
Subjects
Electric resistance measurement; Electrodes; Fabrication; Micromachining; Nanowires; Styrene; Thin films; Correlation coefficient; Force sensor; Inter-digitated electrodes; Laser direct writing; Poly-3 ,4-ethylenedioxythiophene; Polystyrene sulfonic acid; Pulse repetition frequencies; Silver nanowires; Capacitance
Type
journal article