Design criteria of solidly mounted thin film bulk acoustic resonator
Date Issued
2007
Date
2007
Author(s)
Liu, Chien-Hou
DOI
zh-TW
Abstract
Solidly mounted thin film bulk acoustic resonator is a major part of study of filter because it could be used in high frequency range and the manufacture is easy. Reflection layer,consists of periodic structure,is a significant condition of this kind of resonator,because it could keep acoustic energy in piezoelectric layer.So the design of periodic structure of reflection layer is a factor of development of this kind of resonator.
Attenuation coefficient is the major control of energy distribution of one dimensional periodic structure.The first band gap width of infinite periodic structure is directly related to attenuation coefficient.However,the attenuation coefficient of finite periodic structure couldn
Attenuation coefficient is the major control of energy distribution of one dimensional periodic structure.The first band gap width of infinite periodic structure is directly related to attenuation coefficient.However,the attenuation coefficient of finite periodic structure couldn
Subjects
薄膜
體聲波
共振子
thin film
bulk acoustic
resonator
Type
thesis
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