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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write
Details
Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write
Journal
2016 ZEISS Korea Microscopy Workshop
Date Issued
2016
Author(s)
Sheng-Wei Chien
Kuen-Yu Tsai*
Jia-Han Li
KUEN-YU TSAI
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/429882
Type
conference paper