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College of Engineering / 工學院
Industrial Engineering / 工業工程學研究所
A tool portfolio planning methodology for semiconductor wafer fabs
Details
A tool portfolio planning methodology for semiconductor wafer fabs
Resource
Semiconductor Manufacturing Technology Workshop, 2000
Journal
Semiconductor Manufacturing Technology Workshop
Pages
-
Date Issued
2000-06
Date
2000-06
Author(s)
Kao, Chung-En
YON-CHUN CHOU
DOI
10.1109/SMTW.2000.883088
DOI
N/A
URI
http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551448
Type
journal article
File(s)
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Name
00883088.pdf
Size
499.29 KB
Format
Adobe PDF
Checksum
(MD5):c4bd0d39649323770a93906776a1cad8
