Nanopositioning Control on a Commercial Linear Stage by Software Error Compensation
Resource
Nanotechnology and Precision Engineering,4(1),1-9.
Journal
Nanotechnology and Precision Engineering
Journal Volume
4
Journal Issue
1
Pages
1-9
Date Issued
2005-05
Date
2005-05
Author(s)
Fan, K.C.
Cheng, F.
Chen, Y.J.
Type
journal article