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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Microcrystalline Silicon Deposited by Glow Discharge Decomposition of Heavily-Diluted Silane
Details
Microcrystalline Silicon Deposited by Glow Discharge Decomposition of Heavily-Diluted Silane
Resource
The 17th EDMS, Taipei
Journal
The 17th EDMS
Pages
-
Date Issued
1991
Date
1991
Author(s)
Lee, Si-Chen
URI
http://ntur.lib.ntu.edu.tw//handle/246246/121456
Description
Taipei
Type
conference paper
