Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis

Journal

Measurement Science and Technology

Journal Volume

19

Journal Issue

12

Date Issued

2008

Author(s)

Chen, L.-C.

Huang, Y.-T.

Lai, H.-W.

Chen, J.-L.

Chang, C.C.

LIANG-CHIA CHEN

DOI

10.1088/0957-0233/19/12/125303

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447883

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-63749100869&doi=10.1088%2f0957-0233%2f19%2f12%2f125303&partnerID=40&md5=00d6dcf4eb44024c6cd76ac80a7bb5f1

SDGs

[SDGs]SDG9

Type

journal article