Electronic and atomic structures of Si-C-N thin film by X-ray-absorption spectroscopy

Journal

Journal of Electron Spectroscopy and Related Phenomena

Journal Volume

92

Journal Issue

1-3

Pages

115-118

Date Issued

1998

Author(s)

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0032073367&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/337770

Type

journal article