Fabrication of Blue-Laser Zn-Ni Co-diffused Mach-Zehnder Modulator
Date Issued
2005
Date
2005
Author(s)
Chen, Cho-Yan
DOI
zh-TW
Abstract
本研究首次利用鋅鎳擴散式鈮酸鋰光波導，以Z切的基板製作操作於藍光波段(473nm)之直波導及馬赫任德電光調變器。由實驗結果發現，鋅鎳擴散式直波導的寬度為1.5um時導單模態；當鎳與鋅的厚度分別為100Å與500Å時，以830°C的溫度擴散60分鐘之波導具有最佳的光場侷限性，且可避免鈦擴散式光波導之鋰離子外擴散問題。操作在藍光波段下的馬赫任德電光調變器，在電極長度0.9公分時，半波電壓為6.5伏特，而訊熄比則約為7dB。
In this work, Zn-Ni:LiNbO3 single-mode waveguides and Mach-Zehnder modulators operated at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the largest linewidth of the Zn-Ni co-diffused waveguides should be about 1.5um, which is smaller than that of Ti-diffused waveguides, 2.5um. The optical confinement of the waveguides is optimized by diffusing at 830ºC for 60min when the thicknesses of nickel and zinc are 100Å and 500Å, respectively. Moreover, the Zn-Ni:LiNbO3 waveguides are free of lithium out-diffusion as that found in Ti:LiNbO3 waveguides. The Mach-Zehnder modulators operating at blue-laser wavelength are also demonstrated, the half voltage and the extinction ratio of the device are found to be 6.5V and 7dB, respectively.
Subjects
電光調變器
藍光
光折效應
訊熄比
半波電壓
鋅鎳
Mcah-Zehnder modulator
blue light
photorefractive effect
extinction ratio
half voltage
Zn-Ni
Type
thesis
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