High Performance Metal/SiO2/InSb Capacitor Fabricated by Photo-Enhanced Chemical Vapor Deposition

Resource

Journal of Appllied Physics, v.68, p.3701-3706

Journal

Journal of Applied Physics

Journal Volume

v.68

Pages

3701-3706

Date Issued

1990

Date

1990

Author(s)

Yang, Seng-Jenn

URI

Type

journal article