Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

24

Journal Issue

1

Pages

308-311

Date Issued

2006

Author(s)

Hsu, C.H.

Huang, Y.F.

Chattopadhyay, S.

Chen, K.H.

Lo, H.C.

Chen, C.F.

DOI

URI

Publisher

American Institute of Physics

Type

journal article