Impact of integrating equipment health in production scheduling for semiconductor fabrication

Journal

Computers and Industrial Engineering

Journal Volume

120

Pages

450-459

Date Issued

2018

Author(s)

Kao, Y.-T.

Dauzère-Pérès, Stéphane

SHI-CHUNG CHANG

DOI

10.1016/j.cie.2018.04.053

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467299

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047243274&doi=10.1016%2fj.cie.2018.04.053&partnerID=40&md5=0622e84e5e542478fc35df453a59aada

Type

journal article