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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
The Etching Characteristics of (100) GaAs by K2S2O8-H2O System
Details
The Etching Characteristics of (100) GaAs by K2S2O8-H2O System
Journal
Journal of the Electrochemical Society
Journal Volume
132
Journal Issue
12
Pages
3016-3019
Date Issued
1985
Author(s)
Chen, J. A.
Lee, Si-Chen
Ho, T. I.
DOI
10.1149/1.2113714
URI
http://ntur.lib.ntu.edu.tw//handle/246246/120958
Type
journal article
