Development of an automatic test equipment for nano gauging displacement transducers
Journal
Journal of Physics: Conference Series
Journal Volume
13
Journal Issue
1
Pages
216-219
Date Issued
2005
Author(s)
Abstract
In order to satisfy the increasing demands on the precision in manufacturing technology, nanaometrology gradually becomes more important in manufacturing process. To ensure the precision of manufacture, precise measuring instruments and sensors play a decesive role for the accurate characterization and inspection of products. For linear length inspection, high precision gauging displacement transducers, i.e. nano gauging displacement transducers (NGDT), have been often utilized, which have been often utilized, which have the resolution in the nanometer range and can achieve an accuracy of less than 100 nm. Such measurement instruments include transducers based on electronic as well as optical measurement principles, e.g. inductive, incremental-optical or interference optical. To guarantee the accuracy and the traceability to the definition of the meter, calibration and test of NGDT are essential. Currently, there are some methods and machines for test of NGDT, but they suffer from various disadvantages. Some of them permit only manual test procedures which are time-consuming, e.g. with high accurate gauge blocks as material measures. Other tests can reach higher accuracy only in the micrometer range or result in uncertainties of more than 100 nm in the large measuring ranges. To realize the test of NGDT with a high resolution as well as a large measuring range, an automatic test equipment was constructed, that has a resolution of 1.24 nm, a measuring range of up to 20 nm (60 mm) and a measuring uncertainty of approximate ±10 nm can fulfil the requirements of high resolution within the nanometer range while simultaneously covering a large measuring range in the order of millimeters. The test system includes a stable frame, a polarization interferometer, an angle sensor, an angular control, a drive system and piezo translators. During the test procedure, the angular control and piezo translators minimize the Abbe error. For the automation of the test procedure a measuring program adhering to the measurement principle outlined in VDI/VDE 2617 guidelines was designed. With this program NGDT can be tested in less than thirty minutes with eleven measuring points and five repetitions. By mean of theoretical and experimental investigations it can be proved that the automatic test system achieves a test uncertainty of approx. ±10 nm at the measuring range of 18 mm, that corresponds to a relative uncertainty of approximately ±5 × 10-7. With small uncertainty, the minimization of the Abbe error and short test time, this system can be regarded as a universal and efficient precision test equipment, which is available for the accurate test of arbitrary high precision gauging displacement transducers. ? 2005 IOP Publishing Ltd.
SDGs
Type
conference paper