Organic variable optical attenuator made by compliant fluoropolymer membrane
Journal
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Pages
51-52
Date Issued
2005
Author(s)
Abstract
The paper describes the design and fabrication of micro-electro-mechanical systems (MEMS) variable optical attenuator (VOA) made by a compliant organic thin film. The optical attenuation is achieved by changing the radius of curvature of the organic thin film actuated by the electrostatic force. The simulation results show that the attenuation range can achieve 20 dB at the wavelength of 1550 nm
Type
conference paper