Photosensitive polyimide/silica hybrid optical materials: Synthesis properties and patterning
Resource
Polymer 46 (18): 6959-6967
Journal
Polymer
Journal Volume
46
Journal Issue
18
Pages
6959-6967
Date Issued
2005
Date
2005
Author(s)
Wang, Y.W.
Yen, C.T.
Chen, W.C.
DOI
246246/2006111501244049
Abstract
In conventional ionic salt photosensitive polyimides, large volume shrinkage during imidization would be occurred due to eliminating
pendant photosensitive moieties, such as 2-methyl acrylic acid 2-dimethylamino-ethyl ester (MDAE). In this study, the volume shrinkage
of photosensitive poly(4,40-(hexafluoroisopropylidenediphthalic anhydride)-co-oxydianiline) (6FDA-ODA)/MDAE was largely reduced
by photocrosslinking MDAE with a coupling agent and the silica domain in the hybrid materials. The used coupling agents were
3-methacryloxypropyl trimethoxysilane (MPTMS) or (4-vinylphenethyl)trimethoxysilane (VPTMS). The coupling agent and the silica
domain are designed primarily for reducing the volume shrinkage and enhancing the thermal properties, respectively. The retention of
MDAE in the prepared hybrid films is supported by X-ray photoelectron spectroscopy (XPS) and thickness variation during curing process.
The silica domain in the hybrid materials from TEM analysis was in the range of 10–50 nm, which was formed by the coupling agent and
tetramethoxysilane. The silica domain significantly enhanced the thermal properties of the prepared hybrid films in comparison with parent
fluorinated polyimide, including the glass transition temperature and coefficient of thermal expansion. The prepared hybrid materials also
exhibited reduced refractive index and optical loss by increasing the silica. The SEM diagram suggested the prepared photosensitive hybrid
materials could obtain lithographical patterns with a good resolution. These results indicate that the newly prepared photosensitive
polyimide/silica hybrid materials may have potential applications for optical devices.
Subjects
photosensitive
hybrid materials
optical properties
Publisher
Taipei:National Taiwan University Dept Chem Engn
Type
journal article
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