晶圓廠離子植入機台維修人員尿中砷物種分析
Other Title
Speciation of Urinary Arsenic of the Ion Implanter
Maintenance Engineers in the Semiconductor
Fabircation Facility
Maintenance Engineers in the Semiconductor
Fabircation Facility
Date Issued
2001-07-31
Date
2001-07-31
Author(s)
DOI
892314B002375
Abstract
For the wafer fabrication in
semiconductor industry, the maintenance
engineers are potentially exposed to hazards
during their work of disassembling machine
compartments for clean-up. One special
concern is arsenic or arsenic compounds in
working environment. The present study
analyzed speciated urinary inorganic arsenic
metabolites of the maintenance engineers
with HPLC-HG-AAS to study the potential
arsenic exposure during their maintenance
work. Totally, from 6 wafer fabrication
facilities, 30 maintenance engineers were
recruited as exposed group, so were the
another 12 office-based industrial hygienists
serving as control group. First morning
voided urine samples of each study subject
were collected for 7 consecutive days.
Results show the levels of total urinary
inorganic arsenic metabolites for exposed
group were 1.7±1.4 ug/L, 1.4±1.1 ug/L,
6.2±6.7 ug/L, 20.2±14.1 ug/L, 29.5±17.2
ug/L for As 3+ , As 5+ , monomethylarsonic acid,
dimethylarsinic acid and total inorganic
arsenic, respectively. Both concentration of
monomethylarsonic acid and its proportion
among various urinary inorganic arsenic
metabolites showed significantly ascending
trend among control group, engineers without
preventative maintenance work prior to their
urine sampling, and those with such work
prior to sampling (p<0.005, and p<0.0005,
respectively). It was aslo suggested that, at
low level occupational arsenic exposure, the
concentration of total urinary inorganic
arsenic metabolites might be misleading due
to the confounding effect of arsenosuger
coming from seafood. Nevertheless,
speciation of urinary arsenic species is good
and appropriate in such case to use the
proportion change of monomethylarsonic
acid as an indicator for the verification of arsenic exposure.
Subjects
Arsenic
Urine
Speciation
Ion
Implanter
Implanter
Preventative Maintenance
Publisher
臺北市：國立臺灣大學公共衛生學院職業醫學與工業衛生研究所
Type
report
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