High-performance metal/SiO 2 /InSb capacitor fabricated by photoenhanced chemical vapor deposition

Journal

Journal of Applied Physics

Journal Volume

68

Journal Issue

7

Pages

3701-3706

Date Issued

1990

Author(s)

Sun, T.-P.

Lee, S.-C.

Liu, K.-C.

Pang, Y.-M.

Yang, S.-J.

DOI

10.1063/1.346334

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498792

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-4243148111&doi=10.1063%2f1.346334&partnerID=40&md5=a4f7a4f9cbea0e164b796e5c169edaeb

Type

journal article