The Study of Optimization on Process Parameters of High Accuracy Computerized Numerical Control Polishing

Polishing is the grinding technique which can produce the ultra-precision smooth mirror surface. The technique, directly or indirectly, is on behalf of a national machinery manufacturing standards. Belonging back end of line (BEOL) processing optical element production, polishing plays an important role in improving performance not only the quality of life but development of high-tech products. The domestic polishing technique for spherical lens has reached certain level, but spherical lens still have some problem like chromatic aberration and distortion. To solve this kinds of problem, aspherical lens, which cannot be manufacture by traditional polishing technique and can only be fabricate by computer-aided polishing, are used to improve image quality and decrease optical system volume. Computer-aided polishing is studied in this paper. Focusing on surface texture, association between polishing parameters and surface quality are discussed by material removal experiments. For computer-aided polishing fabrication, surface feed rates of polishing bonnet are not the crucial factor of surface texture. And, mid-spatial frequency error can be effectively eliminated by replacing one-direction path by multiple-direction paths. Values of surface’s peak-to-valley and root-mean-square can also be reduced. The cost of polishing process can also be declined at the same time. Hope that this research can promote the development of high accuracy polishing technique and domestic polishing apparatus.