IR Spectroscopic Study of Hg-Sensitized Photo CVD Silicon Oxide
Resource
Japan Journal of Applied Physics, v.129 n.6, p.997-1003
Journal
Japan Journal of Applied Physics
Journal Volume
v.129 n.6
Pages
997-1003
Date Issued
1990
Date
1990
Author(s)
Yang, Seng-Jenn
Type
journal article