Precision sinusoidal local scan for large-range atomic force microscopy with auxiliary optical microscopy

Journal

IEEE/ASME Transactions on Mechatronics

Journal Volume

20

Journal Issue

1

Pages

226-236

Date Issued

2015

Author(s)

Chen, C.-L.

Wu, J.-W.

Lin, Y.-T.

Fu, L.-C.

Chen, M.-Y.

DOI

10.1109/TMECH.2014.2313351

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84922930910&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/393109

Type

journal article