Superlattice Infrared Photodetector with Grating Structure for Normal Incident Light Coupling
Date Issued
2005
Date
2005
Author(s)
Hsiao, Hsueh-Chun
DOI
en-US
Abstract
The superlattice infrared photodetector (SLIP) is designed for wavelength 6~12μm detection. Due to the selection rule of electron transition, only the light polarized in the growth direction can cause intersubband transition. Clearly, this illumination scheme limits the configuration of detectors to linear arrays and single arrays of these detectors. Therefore, the grating structure can be fabricated on the SLIP to couple normal incident light. The incident light is coupled by the diffraction effect on the grating structure.
We fabricate three devices with different period of gratings for topside-illumination. Base on this structure, the photoresponse of each spectral shape is tunable by the period of gratings. The response shape is affected by surface plasmon. The plasmon peak can be selected by period of gratings. In summary, the experimental results confirm the applicability of SLIPs with grating structure for coupling the normal incident light and tunable response shape by surface plasmon.
Subjects
紅外線偵測器
Superlattice Infrared Photodetector
Type
thesis
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