Investigation of Semi-Polar GaN Grown on (0001) C-plane Nano-Sized Patterned-Sapphire Substrates
Journal
Optics InfoBase Conference Papers
ISBN
9781557528209
Date Issued
2016-01-01
Author(s)
Su, Vin Cent
Chen, Po Hsun
Hung, Zheng Hung
You, Yao Hong
Chen, Yen Pu
Hsu, Ta Cheng
Lin, Yu Yao
Lin, Ray Ming
CHIEH-HSIUNG KUAN
Abstract
This paper reported the growth of semi-polar GaN epi-layers on (0001) c-plane nano-sized patterned-sapphire substrates (c-NPSSs). In addition, the impact of c-NPSSs on the quality of semi-polar film had also been studied.
Type
conference paper